ADT ADVANCED DICING TECHNOLOGIES

ADT offer a broad range of peripheral equipment to complement our Dicing Saws:

The Model 966 Series Wafer Mounting Stations handle wafers up to 8" diameter. These versatile systems accept film frames from all manufacturers and include a manual tape feed and tensioner. The captive roller assembly and adjustable, spring-loaded platen provide optimal and consistent wafer/film frame contact pressure for maximum dicing quality.  as:

	5”, 6” and 8” chucks available (optional customization)
	Precise frame positioning via selectable locator pins
	Repeatable mounting pressure
	Adjustable temperature controller
	Excess tape trimmer
	Roller mechanism to separate and remove tape backing
	Tabletop design

Models 955-8 and 955-12 provide controlled and repeatable UV tape curing for single-frame wafer processing. Designed for use in manual operation applications and laboratory environments, these extremely reliable and robust UV tape-curing systems accommodate wafer/frame combination up to 12" (300mm). 

	Ozone free UV irradiation
	Compact tabletop design
	Easy operation
	UV intensity monitoring
	Lamp operation hours quantification

The cleaning station is designed for sub-micron cleansing of wafers and other diced materials. The system utilizes a high-pressure, de-ionized water spray with optional, fixed or oscillating surfactant dispensers. The system offers rapid drying combining a variable spin centrifuge with nitrogen blow-off and an optional IR heat lamp. Model 974, a microprocessor-controlled version of the 976, enables storage of multiple programs.  

	Ceramic Substrates
	Oscillating high pressure DI water jet adjustable to 2000 psi (13.8 Mpa)
	Microprocessor (optional)
	Variable spin speed
	Nitrogen blow-off
	Model 974 wafer/substrate diam. up to 10”
	Model 975 wafer/substrate diam. up to 12"
	Model 976 wafer/substrate diam. up to 8”

The Model 933 is a compact, recirculating chiller and links to ADT dicing equipment for reduction of spindle thermal expansion and increased dicing accuracy. This compact, portable system features monitoring of temperature, flow and fluid level and offers high stability to ±0.1°C..

	Compact design, small footprint
	High Capacity (one system for two spindles)
	Safe monitoring of temperature, flow and fluid level
	Microprocessor controller for easy setup and operation
	Reduces operation costs by eliminating the need for water treatment
	Protects the spindle from limescale, corrosive dissolved minerals and particulates found in tapwater

The Model 940 dissolves CO2 gas in the DI flow to reduce water resistance and thus prevent the build-up of electrostatic charges on sensitive devices during singulation, rinsing and cleaning.

	Prevents water contamination
	Resistance control from 20 kOhm to 2 MOhm
	Supplies re-ionized water to multiple dicing and cleaning systems
	Compact design
	Capacity:15 liter/min (4 gpm)
	Power:208-230 VAC; 10 A 50/60 Hz;

The Closed-loop Filtration system filtrates and recycles process water, enables regulation of water temperature and accommodates the use of special coolant additives associated with dicing applications.

	Reduces operating cost by minimizing wastewater emissions and controlling additive emulsions.
	Enables setting and controlling of water temperature (as low as 8 ºC (46 ºF)
	Capable of supplying process water to two M/Cs
	Microprocessor controlled operation
	Two-stage filtration kit (optional)
	Small footprint

ADT offers a complete line of film frames, compatible with a variety of saw manufacturers, that handle 3"-12" wafers. Constructed of hardened magnetic stainless steel with an electro-polished finish, special models are available upon request. Cassettes are also available in styles and sizes to accommodate all film frames. (see also AUER Products)

	Frames For All Saw Mfrs Accept 3"-12" Wafers
	Cassettes Available With .187" or .250" Slot Pitch
	Custom Models Available Upon Request

ADT offers the industry's most extensive catalog of dicing blades in an unlimited combination of diameters, thicknesses and geometries.

  to the DICING BLADE webpage