BEIJERT ENGINEERING

SUPERVISOR 

SUPERVISOR is a probe card test and verification system that is intended to be used as a production tool for the characterization of probe cards before and after use and to facilitate rework of probe cards which do not conform to predefined standards. Supervisor consists of a computer, unique Windows operating software, a precision measurement system, a software based vision system and precision motion control and measurement system. Supervisor is intended for the measurement and adjustment of probe card planarization, visual X/Y location and adjustment, Probe contact resistance, leakage and component measurements.   

Supervisor is designed to quickly verify that each probe card conforms to your previously determined acceptable standards for your wafer sort line. Each probe card has its own unique data reference file into which the pass/fail criteria are placed. All of the Supervisor's capabilities can be brought into play to precisely evaluate each probe's position, automatically measuring the planarization of each probe.  
Electrical parameters including contact resistance and leakage are also measured against the reference file. The simple graphics display shows that the probe card assembly passed or failed. If a failure is determined, a full report can be printed to accompany the card for rework. This quick verification validates that a probe card assembly is ready for test or is in need of rework.  

The Supervisor imaging system consists of two separate over and under video camera systems. The two image perspectives clearly define visually, actual X & Y locations. The actual visual locations can be compared with the desired coordinate pad locations, which are stored in the reference data file. The coordinate data file can then be overlaid on the display and compared visually with the actual video image. All video images can be captured and printed to a laser printer for documentation.   

Supervisor's live image with pad map overlay permits drag and drop relocation of probe tips. This represents the ultimate in rework convenience and user friendly probe tip manipulation.
Supervisor provides extensive software control permitting full probe array or partial array views. The pad overlays, which are based on the earlier created coordinate file, permit a fast visual analysis of probe alignment thus permitting immediate rework.
In the rework mode, each probe position is determined for X/Y and Z location and compared against the reference file. The rework screens provide a clear display of probe planarization relative to the reference plane and the allowable planarization tolerance. The X/Y positions of the probes are displayed and the pad reference locations are superimposed over the displayed actual locations to facilitate rework. The video image can be captured and printed to provide visual documentation of location. An overhead video image can also be displayed, captured and printed to provide a top view perspective during rework or for documentation.  

In addition to alignment and planarity, Supervisor can measure contact resistance and compare the results against the stored reference data file. Probe tips can be cleaned or sanded on the Supervisor to allow for retest of contact resistance. Supervisor will also measure probe card leakage, overall probe/trace resistance and installed capacitors.   

Supervisor can also measure contact force for the probe card assembly. The measurement technique is to measure all probes in one movement and calculate the average value.  

Supervisor can clean and exercise the probes on a probe card. The user can program the number of repetitions for abrasive cleaning and then retest for contact resistance. Similarly, the user can program the number of exercise repetitions to either relieve embedded stress in probes or to stress test for cantilever beam fatigue which could affect the ability of the probes to maintain planarity.  

Supervisor has a system setup mode, which allows Supervisor to correlate measurement results with other analyzers. Taking the complete test report of a known good probe card from another analyzer and performing the same tests Supervisor does this. The setup screen allows the user to apply measurement offsets, which are then fixed in Supervisor. From that point forward the results provided by Supervisor will correlate with the other analyzers.    

Supervisor provides clear, concise reports in a universally familiar MS Excel format. The reports can be printed to the screen or sent to a laser printer for permanent documentation.    

Although Supervisor has considerable measurement and analytical capability, Supervisor has been designed from the beginning to serve its primary mission as a probe card verification system. Its primary purpose is to ensure the integrity of probe card assemblies and verify that they are ready for test. SPC characterization before and after wafer sort will also allow analysis of probe card performance characteristics and facilitate correlation to test yield.    

Current Windows PC.  

All measurement electronics and I/O connections are contained in a robust measurement system enclosure. The measurement center Channels is supplied as standard with 256 channels. (Option to 1280 channels.). 

Z - Stage Accuracy

Repeatability

Step Resolution

Overtravel

Upper imaging system for top view of card assembly for real time probe tip adjustment and external video output connection for video documentation printer. Internal imaging system to compare X/Y location and to view the condition of the probe tips. When combined with a X/Y location data file, actual location can be compared with specified location. Images can be sent a high resolution printer.   

Computer - 120 VAC 60 Hz or 220 VAC 50 Hz with switch.

Rectangular probe cards with 48, 70, 88, 100, 120, 128 pin card edge connectors. Select and order separately as required.

Measurement Center - auto switching 90 - 265 VAC 50/60 Hz. 

Motherboards - can accommodate most existing motherboards or custom interfaces can be designed based upon customer needs.  

Internal power filters to ensure precise measurements even with a marginal power source.

Measurement Range

Measurement Range

Accuracy

Accuracy

Current Source

Voltage Source

Measurement Technique

Measurement Technique

Measurement Range

Measurement Range

Accuracy

Accuracy

Current Source

Measurement Technique

Measurement Technique

Measurement Range

Temperature

Accuracy

Humidity

Measurement Technique