Grain
manipulation for increased sputtering thickness
GENERAL
“Magnetically
Enhanced” targets have been developed to optimize the PTF of our
magnetic targets. This improvement has been achieved through grain
manipulation of our magnetic materials. ME™ grade targets allow our
customers to sputter magnetic materials at an increased thickness, as
well as increase the deposition rate at the original thickness.
PROCESS
In addition,
the increased PTF may help stabilize the plasma, which will result in
improved film uniformity. These benefits have been implemented without
sacrificing consistently fine grain size and are verified using our
internal PTF measurement device. ME™ grade targets are available for all
target configurations.