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THERMOTECH TE |
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Thermotech TE™ is a Silver-filled,
electrically conductive high-vacuum compound specifically manufactured
by Pure Tech for the sputtering target industry. Thermotech TE combines
the excellent thermal and electrical conductive properties of pure
Silver with a low vapor pressure sealant, enabling it to withstand high
vacuum operating ranges. Thermotech TE contains no Silicone, and is
non-hardening. Furthermore, Thermotech TE absorbs grease and chemical
impurities on metal surfaces, and cleans up easily with solvents such as
methanol or acetone, leaving surfaces virtually contamination-free after
use. |
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GENERAL |
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Electrically
conductive compound for high-vacuum applications
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Thermotech TE is applied along the contact
surfaces of the sputtering target and cooling plate in systems that are
indirectly water-cooled. Because it is a viscous sealant, Thermotech TE
fills small scratches and surface imperfections better than Indium foil,
dramatically increasing target cooling. Since it is electrically
conductive, Thermotech TE will not hinder DC sputtering operation.
(Note: do not apply Thermotech TE directly
to ceramic or porous metallic targets. Such targets should be bonded to
a backing plate before installing.) |
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PROPERTIES |
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AVAILABILITY |
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Operating temperature range |
10°C - 160°C |
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Vapor pressure @ 20°C
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2 x 10-9 Torr |
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Density |
1.97 g/cc |
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Color |
Gray |
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Pure Tech's Thermotech TE is available in
50g kits. Each kit contains enough compound for a 5" x 15" rectangular
or 10" diameter round cathode sealing area. Each kit includes utensils
for applying and spreading the compound. Please contact your Pure Tech
Sales Engineer for availability of larger kits. |
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HOW TO APPLY |
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Mix the compound well before beginning.
Apply a small amount of Thermotech TE to the side of the sputtering
target, which will contact the cooling plate surface. Using the enclosed
scraper, evenly spread the compound so that the contact surface is
completely covered. DO NOT APPLY TOO MUCH compound: a layer
approximately .015" thick is sufficient for most applications. Using an
appropriate solvent, clean away any excess compound. Install the target,
making sure there is firm contact between the target and the cooling
plate. (NOTE: in some systems it may be easier, or necessary, to apply
the compound to the cooling plate surface instead of the target.) After
use, Thermotech TE may be scraped away and any residual compound wiped
clean with appropriate solvent.
CAUTION: Refer to MSDS
before opening or handling |
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RELATED TO THIS ITEM |
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+ Target Bonding
+ Sputtering Target Recycling |
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One-Stop Shopping -
Sputtering Targets, Backing Plates, Bonding and Recycling too! |
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