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Descumming

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YIELD Engineering Systems Inc.

YES home page
DESCUMMING 

YES G1000

In wafer fabrication, photoresist is used to transfer a circuit pattern onto the wafer. Once a pattern is applied, the remaining photoresist must be removed from the photomask before it can be used again. The process of removing residues (scum) is known as descumming.

Plasma systems such as the YES-CV200RF or the YES-G1000 are effective for cleaning, descumming, and removing organics.
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Last modified: 2011-11-12