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Thermotech TE™

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WILLIAMS Advanced Materials 

 Williams Advanced Materials

THERMOTECH TE 

Thermotech TE™ is a Silver-filled, electrically conductive high-vacuum compound specifically manufactured by Pure Tech for the sputtering target industry. Thermotech TE combines the excellent thermal and electrical conductive properties of pure Silver with a low vapor pressure sealant, enabling it to withstand high vacuum operating ranges. Thermotech TE contains no Silicone, and is non-hardening. Furthermore, Thermotech TE absorbs grease and chemical impurities on metal surfaces, and cleans up easily with solvents such as methanol or acetone, leaving surfaces virtually contamination-free after use.

GENERAL 



Electrically conductive compound for high-vacuum applications

Thermotech TE is applied along the contact surfaces of the sputtering target and cooling plate in systems that are indirectly water-cooled. Because it is a viscous sealant, Thermotech TE fills small scratches and surface imperfections better than Indium foil, dramatically increasing target cooling. Since it is electrically conductive, Thermotech TE will not hinder DC sputtering operation.

(Note: do not apply Thermotech TE directly to ceramic or porous metallic targets. Such targets should be bonded to a backing plate before installing.)

PROPERTIES  AVAILABILITY 
Operating temperature range 10°C - 160°C
Vapor pressure @ 20°C 2 x 10-9 Torr
Density 1.97 g/cc
Color Gray

Pure Tech's Thermotech TE is available in 50g kits. Each kit contains enough compound for a 5" x 15" rectangular or 10" diameter round cathode sealing area. Each kit includes utensils for applying and spreading the compound. Please contact your Pure Tech Sales Engineer for availability of larger kits.

HOW TO APPLY  

Mix the compound well before beginning. Apply a small amount of Thermotech TE to the side of the sputtering target, which will contact the cooling plate surface. Using the enclosed scraper, evenly spread the compound so that the contact surface is completely covered. DO NOT APPLY TOO MUCH compound: a layer approximately .015" thick is sufficient for most applications. Using an appropriate solvent, clean away any excess compound. Install the target, making sure there is firm contact between the target and the cooling plate. (NOTE: in some systems it may be easier, or necessary, to apply the compound to the cooling plate surface instead of the target.) After use, Thermotech TE may be scraped away and any residual compound wiped clean with appropriate solvent. CAUTION: Refer to MSDS before opening or handling

RELATED TO THIS ITEM  

+ Target Bonding
+ Sputtering Target Recycling

One-Stop Shopping - Sputtering Targets, Backing Plates, Bonding and Recycling too!

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Last modified: 2016-08-22