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Vacuum Bake Prod. Chart

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YIELD Engineering Systems Inc.

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Dual Function Models
Vacuum Bake / Vapor Prime Product Specification Chart
  YES-3TA YES-5TA
CLEANLINESS
(Typical Results)
less than 10x1-micron particles per 4-inch wafer less than 5x1-micron particles per 6-inch wafer
CAPACITY: Vapor Prime 8 cassettes of 4-inch wafers 8 cassettes of 5 or 6-inch wafers
or 12 cassettes of 4-inch wafers
Vapor Prime Image Reversal (Model YES-310TA)
above listed Vapor Prime capacity, or Image Reversal on 4 cassettes of 4-inch wafers.
(Model YES-58TA)
above listed Vapor Prime capacity or Image Reversal on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers
Vapor Prime Image Reversal Silylation   (YES-58TASM)
above listed capacities for Vapor Prime and Image Reversal or Silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers
THROUGHPUT 2 full loads/hr 2 full loads/hr
HMDS USAGE < 4ml/200 wafers(120 prime cycles/pint) < 5ml/200 wafers(75 prime cycles/pint)
TEMPERATURE STABILITY 160C max 5C 160C max 5C
DIMENSIONS: Chamber 12-in (305mm) High
12-in (305mm) Wide
13.25-in (336mm) Deep
16-in (406mm) High 16-in (406mm) Wide18-in (406mm) Deep
DIMENSIONS: System 27.5-in (699mm) High23.75-in (603mm) Wide19.5-in (495mm) Deep 31.75-in (806mm) High27.75-in (705mm) Wide23-in (584mm) Deep
WEIGHT Stand-Alone 170 pounds 245 pounds
WEIGHT Int'l Shipping
(Includes Crate)
460 pounds 510 pounds
POWER: System
Vacuum Pump
115V, 60Hz, 1 Phase 10.5A or
230V, 50Hz, 1 Phase, 5.3A,
115V, 60Hz, 1 Phase, 7A or
230V, 50Hz, 1 Phase, 3.5A
115V, 60Hz, 1 Phase, 14A or
230V, 50 Hz, 1 Phase, 7A,
115V, 60Hz, 1 Phase, 7A or
230V, 50Hz, 1 Phase, 3.5A

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Last modified: 2017-11-09